Method of fabricating a high density, low power, merged vertical

Metal working – Method of mechanical manufacture – Assembling or joining

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29578, 29576C, 148 15, 148DIG55, 365104, H01L 2120

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active

046514090

ABSTRACT:
A fuse programmable ROM includes a wafer for a CMOS-type structure having an emitter, which emitter is overlain by a fuse pad of an undoped polysilicon and a conductive layer. There is a layer of barrier oxide disposed on the conductive top layer of the fuse pad and a sidewall oxide surrounding the periphery of the fuse pad both of which are overlain by the metallic electrical connection.
The process of producing the fuse programmable ROM includes wide utilization of standard CMOS fabrication techniques with which are included the steps of depositing fuse material of undoped polysilicon, forming the fuse material into a fuse pad, and then making an electrical connection with the fuse pad.

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"Fijitsu Comes Out with Fastest 64K PROM", Electronic Engineering Times, Monday, Dec. 6, 1982, p. 10.

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