Method of fabricating a halftone mask having a shielding...

Details Method of fabricating a halftone mask having a shielding... Method of fabricating a halftone mask having a shielding...

2011-05-17

2011-11-01

Huff, Mark F (Department: 1721)

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

Reexamination Certificate

active

08048598

ABSTRACT:
A method of fabricating a halftone mask, which includes the steps of: forming shielding patterns on a transparent substrate; forming a first halftone transmission pattern on the transparent substrate between the shielding patterns; and forming a second halftone transmission pattern on the first halftone transmission pattern, wherein a width of the second halftone transmission pattern is narrower than a width of the first halftone transmission pattern, wherein the shielding patterns are in contact with a border of the first halftone transmission pattern; and wherein portions of the first halftone transmission pattern, at gaps that are present in between the shielding patterns and the second halftone transmission pattern, are uncovered by the second halftone transmission pattern.

REFERENCES:
patent: 5856049 (1999-01-01), Lee
patent: 6391499 (2002-05-01), Kim et al.
patent: 2001/0009745 (2001-07-01), Kim
patent: 2003/0190556 (2003-10-01), Nakashima et al.
patent: 1152292 (2004-08-01), None
patent: 2005 24730 (2005-01-01), None
patent: 10 2005 0016704 (2005-02-01), None

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