Method of fabricating a fluid drop ejector

Details Method of fabricating a fluid drop ejector Method of fabricating a fluid drop ejector

1999-10-14

2000-10-03

Smith, Matthew

Semiconductor device manufacturing: process

Manufacture of electrical device controlled printhead

298901, 347 1, 347 68, 347 71, 347 29, 347 9, 347 3, 205 75, 346 11, 346140R, H01L 2100

Patent

active

061271985

ABSTRACT:
The silicon fluid ejector of the present invention includes an electrostatically actuated micromachined positive displacement mechanism consisting of a piston, piston containment structure, piston retraction mechanism and an ejection orifice. These features provide for very low cost of production, high reliability and "on demand" drop size, modulation. The fluid ejector mechanism can be easily produced via monolithic batch fabrication based on the common production technique of surface micromachining.

REFERENCES:
patent: 5087930 (1992-02-01), Roy et al.
patent: 5463411 (1995-10-01), Wehl
patent: 5506608 (1996-04-01), Marler et al.
patent: 5565113 (1996-10-01), Hadimioglu et al.
patent: 5581861 (1996-12-01), Lee et al.
patent: 5685491 (1997-11-01), Marks et al.
patent: 5929875 (1999-07-01), Su et al.

Affiliated with

Also associated with

Rating

Method of fabricating a fluid drop ejector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating a fluid drop ejector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating a fluid drop ejector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-194483