Method of fabricating a field emmision cold cathode

Details Method of fabricating a field emmision cold cathode Method of fabricating a field emmision cold cathode

1997-04-25

2000-03-14

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

445 50, H01J 902

Patent

active

06036565&

ABSTRACT:
There is provided a method of fabricating a field emission cold cathode, including the steps, in sequence, of (a) forming a first insulating layer on a substrate and further forming a first electrode layer on first insulating layer, (b) forming at least one opening in first electrode layer, (c) forming a second insulating layer on first electrode layer and further forming a second electrode layer on second insulating layer, (d) forming at least one opening in second electrode layer, (e) optionally repeating steps (c) and (d) predetermined number of times, (f) forming a cavity extending from an uppermost electrode layer to substrate, (g) forming a first sacrifice layer around a first opening of a first electrode layer, (h) forming a second sacrifice layer around a second opening of a second electrode layer, and (i) forming an emitter electrode on substrate with first sacrifice layer being used as a mask. The method enables a field emission cold cathode including a focusing electrode to have small misalignment between an opening of a first opening of a first electrode layer and an emitter electrode to the same degree as that of a field emission cold cathode including no focusing electrode.

REFERENCES:
patent: 5628661 (1997-05-01), Kim et al.
patent: 5735721 (1998-04-01), Choi

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