Method of fabricating a field emission device

Details Method of fabricating a field emission device Method of fabricating a field emission device

1995-07-31

1997-10-07

Ramsey, Kenneth J.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

313336, 445 24, H01J 902

Patent

active

056752105

ABSTRACT:
A method of fabricating a field emission device which can facilitate the formation of a micro-tip for emitting electrons by a field effect. The micro-tip is fabricated such that the etching rate differences among the tungsten cathode, the lower titanium adhesive layer and the upper aluminum mask, and the internal stress differences are made to be very large, and thus, tungsten micro-tip is protruded by the internal stress when the adhesive layer and the mask are instantaneously etched. Since the micro-tip size is easily adjusted, and the internal stress of tungsten and characteristics of BOE method are utilized throughout the fabricating process, the reproducibility is ensured.

REFERENCES:
patent: 5217401 (1993-06-01), Watanabe et al.

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