Method of fabricating a field emission device

Details Method of fabricating a field emission device Method of fabricating a field emission device

1996-09-10

1998-08-11

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

With assembly or disassembly

H01J 902

Patent

active

057919593

ABSTRACT:
To fabricate a field emission device a micromechanically manufactured array (1) of widely-spaced tips (2) and a micromechanically manufactured perforated extracting electrode (3) are provided. The outer sides of the perforated extracting electrode are bonded to the array in a way that the perforated extracting electrode is facing the array. With the array of widely-spaced tips and the perforated extracting electrode being fabricated separately and bonded together subsequently, both the number of process steps required for each of the two parts and the manufacturing process costs are reduced.

REFERENCES:
patent: 3956667 (1976-05-01), Veith
patent: 4362967 (1982-12-01), Littwin et al.
patent: 4613399 (1986-09-01), Kobale et al.
patent: 4708678 (1987-11-01), Tischer et al.
patent: 5583393 (1996-12-01), Jones
patent: 5624293 (1997-04-01), Khan et al.

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