Method of fabricating a field-emission cold cathode

Details Method of fabricating a field-emission cold cathode Method of fabricating a field-emission cold cathode

1996-01-29

1998-07-28

Ramsey, Kenneth J.

Electric lamp or space discharge component or device manufacturi

Process

Electrode making

445 58, H01J 902

Patent

active

057873372

ABSTRACT:
In a field-emission cold cathode forming an emitter by the vacuum deposition method, contamination at the side surface of the insulating layer due to deposition of an emitter material during formation of the emitter is prevented. Thereby, deterioration of insulating resistance and dielectric strength between gate and emitter can also be prevented. With an oblique vacuum deposition, a sacrificing layer 5 is formed onto the entire area of the side surface within the cavity 4, an emitter is then vacuum deposited, and thereafter emitter material particles are removed together with the protecting film.

REFERENCES:
patent: 5136764 (1992-08-01), Vasquez
patent: 5151061 (1992-09-01), Sandhu
patent: 5249340 (1993-10-01), Kane et al.
patent: 5628661 (1997-05-01), Kim et al.

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