Method of fabricating a color image sensor from a gray scale ima

Details Method of fabricating a color image sensor from a gray scale ima Method of fabricating a color image sensor from a gray scale ima

1996-05-15

1998-08-11

Powell, William

Etching a substrate: processes

Forming or treating optical article

216 41, 216 75, B44C 122

Patent

active

057923744

ABSTRACT:
A method of fabricating a color image sensor includes the steps of: (a) providing a gray scale image sensor with an array of photoelectric converting cells and a plurality of bonding pads on a substrate; (b) applying a first transparent layer on surface of the gray scale image sensor; (c) successively forming first, second and third color filter patterns on the first transparent layer, the first color filter pattern being disposed directly above a first group of the photoelectric converting cells, the second color filter pattern being disposed directly above a second group of the photoelectric converting cells, the third color filter pattern being disposed directly above a third group of the photoelectric converting cells; (d) coating a second transparent layer on the color filter patterns and on portions of the first transparent layer not covered by the color filter patterns; (e) depositing a metal layer on the second transparent layer; (f) patterning and etching the metal layer so as to remove portions of the metal layer, the second transparent layer and the first transparent layer which are directly above the bonding pads to expose the bonding pads; and (g) removing remaining portions of the metal layer.

REFERENCES:
patent: 5340619 (1994-08-01), Chen et al.
patent: 5364498 (1994-11-01), Chen

Affiliated with

Also associated with

Rating

Method of fabricating a color image sensor from a gray scale ima does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating a color image sensor from a gray scale ima, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating a color image sensor from a gray scale ima will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-385883