Method of fabricating a charged couple radiation sensing device

Adhesive bonding and miscellaneous chemical manufacture – Methods – Surface bonding and/or assembly therefor

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156 17, 156 18, 204 38A, 204192, 357 24, 357 30, 427 90, 427 94, H01L 21306

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active

039416305

ABSTRACT:
Method of fabricating an image sensing array, such as one of the charge coupled device (CCD) type, with a set of transparent insulated conductors over the image receiving surface. A transparent conductor layer on an insulated substrate surface is covered with a thin layer of aluminum. The desired pattern of electrodes is then defined in the aluminum by, for example, a photolithographic masking and etching process. The aluminum remaining is then anodically oxidized to form aluminum oxide, a transparent insulator. The portions of the transparent conductor not protected by the aluminum oxide are then removed and what remains are transparent conductors covered on top by transparent insulation.

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patent: 3836446 (1974-09-01), Tiefert
patent: 3855112 (1974-12-01), Tomozawa et al.

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