Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor – Assembly of plural semiconductive substrates each possessing...
Reexamination Certificate
2002-12-04
2003-12-30
Le, Dung Anh (Department: 2818)
Semiconductor device manufacturing: process
Packaging or treatment of packaged semiconductor
Assembly of plural semiconductive substrates each possessing...
C438S106000, C438S107000, C438S111000, C257S678000, C257S734000, C257S778000
Reexamination Certificate
active
06670219
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of Invention
The present invention relates generally to a cavity down ball grid array package (CDBGA) and a fabrication method thereof More particularly, the present invention relates to an improved CDBGA package with high reliability.
2. Description of Related Art
With the increasing need for high-density devices for use in lightweight, portable electronics, there has been a gradual shift in the sizes of integrated circuits and their package configurations. This gradual shift has resulted in developing various techniques for different package types.
A ball grid array (BGA) package is a common packaging method in the field of electronic packages. The BGA package utilizes tape or other adhesive materials to adhere a back surface of a chip onto a die pad of a substrate. A plurality of bonding pads are electrically connected to a plurality of nodes of the substrate by conductive wires. A molding compound encapsulates the chip, conductive wires and nodes. A plurality of solder balls are formed on the nodes of the substrate. The above-mentioned structure of a BGA package can utilize solder balls to electrically connect to external circuits. The layout of the solder balls of the BGA package is in a matrix form and it is suitable for a high-density package because it can contain a large quantity of external circuits.
However, although the packaging size is reduced, the integration of the device is increased. Thus the heat produced per unit of area of the device increases Therefore a heat dissipation problem occurs. For a BGA package, a cavity down ball grid array (CDBAG) package has better heat dissipation because the back surface of the chip is in contact with a heat spreader, and heat is transferred through the heat spreader to the external environment. Thus, the structure of the CDBGA package is often utilized
FIGS. 1-4
are schematic cross-sectional views of fabricating a CDBGA package in accordance with U.S. Pat. No. 6,020,617.
Referring to FIG.
1
and
FIG. 1A
, wherein the FIG. A depicts a top view of
FIG. 1
, shows a thermal dissipating substrate
110
comprising a heat spreader
130
and a ground plate
140
. The ground plate
140
is adhered onto a surface
132
of the heat spreader
130
by an adhesive material
120
. An opening
142
is formed in the ground plate
140
. Thus, a cavity is formed in the center of the thermal dissipating substrate
110
A loop-shaped first node
146
and a plurality of second nodes
148
are selective plated on a surface
144
of the ground plate
140
. The first node and the second nodes are made of materials selected from a group consisting of gold and silver. A black oxide treatment is carried out to roughen a surface
144
of the ground plate
140
, so that the adhesion between the ground plate and the substrate (not shown) can be increased.
Referring to
FIG. 2
, a substrate
150
comprising an insulating layer
160
and a patterned trace layer
170
. The insulating layer
160
of the substrate
150
is adhered onto the surface
144
of the ground plate
140
by an adhesive material
122
. A plurality of ground pads
172
, ball pads
174
and nodes
176
are formed on the patterned trace layer
170
. The substrate
150
further comprises a solder mask layer
180
that protects the patterned trace layer
170
and exposes the ground pads
172
, the ball pads
174
and nodes
176
. A plurality of vias
190
, which are formed on the substrate
150
, are pierced through the patterned trace layer
170
, insulating layer
160
and adhesive material
122
, and the second nodes
148
are exposed.
A stencil printing method is utilized to fill a conductive material into the vias
190
in order to electrically connect the ground pads
172
to the second nodes
148
.
Referring to
FIG. 3
, a chip
200
has an active surface
202
and a corresponding back surface
204
, wherein a plurality of bonding pads
206
and ground bonding pads
208
are formed on the active surface
202
. The back surface
204
of the chip
200
is adhered onto a surface
132
of the heat spreader
130
by an adhesive material
124
. The bonding pads
206
are electrically connected to the node
176
by a plurality of conductive wires
210
, and the ground bonding pads
208
are also electrically connected to the first nodes
146
.
Referring to
FIG. 4
, a molding process is carried out to encapsulate the chip
200
, the bonding pads
206
, the ground bonding pads
208
, the conductive wires
210
, the first node
146
and the nodes
176
by a molding compound
220
. A plurality of solder balls
230
are formed on the ground pads
172
and the ball pads
174
.
However, in the above-mentioned fabrication process, the conductive material has to be filled into the vias by the stencil printing method This step of utilizing the stencil printing method is complex, and thus the cost is increased. On the other hand, voids often occur inside the conductive material in the vias during the stencil printing process because of poor gap-fill. Therefore, the reliability of the product is reduced
SUMMARY OF THE INVENTION
Accordingly, it is an object of the present invention to provide a CDBGA package and a fabrication method thereof, which can simplify the fabrication process and reduce the production cost.
It is another object of the present invention to provide a CDBGA package and a fabrication method thereof, which can ensure a good electrical connection of the conductive material in the vias, so that the reliability of the device can be improved.
To achieve the above objects and other advantages in accordance with the present invention, the present invention provides a CDBGA package comprising: a thermal dissipating substrate having a chip region located in the center and a circuit substrate region located at a periphery of the chip region; a plurality of conductive bumps formed on the circuit substrate region; a circuit substrate comprising an insulating layer and a patterned trace layer, wherein a plurality of vias are formed in the insulating layer and correspond to the conductive bumps, and the insulating layer is adhered on the circuit substrate region; a plurality of ground pads, ball pads and nodes are formed on the patterned trace layer, wherein the ground pads correspond to the vias, and a hole is formed at the center of each ground pad corresponds to each via; the circuit substrate further comprises a solder mask layer covering the patterned trace layer and exposing the ground pads, ball pads and the nodes; a chip having an active surface and a corresponding back surface, the back surface of the chip is adhered on the chip region, and a plurality of bonding pads are formed on the active surface, wherein the bonding pads are electrically connected to the nodes; a molding compound encapsulating the chip, the nodes and the connecting parts of the bonding pads and the nodes; and a plurality of solder balls located on the ground pads and the ball pads, wherein the solder balls located at the ground pads fill the vias and are electrically connected to the conductive bumps.
To achieve the foregoing and other objects and in accordance with the purpose of the present invention, the present invention provides a method of fabricating a CDBGA package, and the steps of the method comprise: providing a thermal dissipating substrate having a chip region in its center and a circuit substrate region located at a periphery of the chip region; forming a plurality of conductive bumps on the circuit substrate region; forming a circuit substrate, the circuit substrate comprising an insulating layer and a patterned trace layer, wherein a plurality of vias that are formed on the insulating layer correspond to the conductive bumps; adhering the insulating layer on the circuit substrate region; forming a plurality of ground pads, ball pads and nodes on the patterned trace layer, wherein the ground pads are located on the vias, and each ground pad has a hole located in its center and corresponding to each via; forming a solder mask to cover the patterned trace layer
Chen Chin-Te
Lee Ming-Xun
J.C. Patents
Le Dung Anh
Siliconware Precision Industries Co. Ltd.
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