Method of fabricating a capacitor having sidewall spacer...

Details Method of fabricating a capacitor having sidewall spacer... Method of fabricating a capacitor having sidewall spacer...

2006-02-07

2006-02-07

Tugbang, A. Dexter (Department: 3729)

Metal working

Electric condenser making

Solid dielectric type

C029S025410, C029S841000, C029SDIG016, C438S689000

Reexamination Certificate

active

06993814

ABSTRACT:
A capacitor structure is fabricated by forming a bottom plate, forming a dielectric layer overlaying the bottom plate, and forming a top plate over the dielectric layer. In addition, at least one insulating sidewall spacer that protects the dielectric layer during processing is formed along the perimeter of the top plate and overlaying a portion of the dielectric layer.

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