Method of fabricating a biosensor

Details Method of fabricating a biosensor Method of fabricating a biosensor

2005-11-22

2010-06-22

Laudau, Matthew C (Department: 2813)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Chemically responsive

C438S701000, C204S403010, C257SE21495

Reexamination Certificate

active

07741142

ABSTRACT:
The present invention provides a method of fabricating a biosensor. The method includes providing a substrate which has a surface coating. The surface coating is deformable and the substrate includes a layered structure which has at least two electrically conductive layers separated by at least one electrically insulating layer. The method also includes imprinting a structure into the surface coating. Further, the method includes etching at least a region of the imprinted structure and the substrate to remove at least a portion of the structure and the substrate. The structure is shaped so that the etching forms at least a portion of the biosensor in the substrate and exposes at least a portion of each electrically conductive layer to form electrodes of the biosensor.

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patent: 2008/0135408 (2008-06-01), Sjolander

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