Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-05-15
1997-07-01
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 71, 355 77, G03B 2742, G03B 2732, G03B 2772
Patent
active
056443811
ABSTRACT:
By the method of exposure using attenuation type phase shift mask, based on the phase angle of exposure light passing through second and third light transmitting portions and on hole diameters of the second and third light transmitting portions, an optimal value between first and second distances h.sub.1 and h.sub.2 can be calculated. Therefore, a resist film can be exposed at optimal focal position. As a result, even when there is a step in the material to be exposed, a desired pattern can be exposed with high precision through the same steps in every region of the material to be exposed.
REFERENCES:
patent: 4231657 (1980-11-01), Iwamatsu
patent: 4355892 (1982-10-01), Mayer et al.
patent: 5328784 (1994-07-01), Fukuda
patent: 5393623 (1995-02-01), Kamon
patent: 5411824 (1995-05-01), Vasudev et al.
patent: 5428478 (1995-06-01), Hanyu et al.
"Imaging Characteristics Of Multi-Phase-Shifting And Halftone Phase-Shifting Masks", Terasawa et al., JJAP Series 5, pp. 3-9.
"Systematic Design Of Phase-Shifting Masks With Extended Depth Of Focus And/Or Shifted Focus Plane", Liu et al., SPIE vol. 1674, pp. 14-16, 18-52.
Miyazaki Junji
Yoshioka Nobuyuki
Grimley Arthur T.
Kerner Herbert V.
Mitsubishi Denki & Kabushiki Kaisha
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