Method of exhaust control for spin-on films with reduced defects

Details Method of exhaust control for spin-on films with reduced defects Method of exhaust control for spin-on films with reduced defects

1998-04-06

1999-11-16

Bell, Janyce

Coating processes

Centrifugal force utilized

4273855, 437231, B05D 312

Patent

active

059853646

ABSTRACT:
Spin-on coatings are applied by ramping-up the exhaust level in the spin coating chamber to achieve a predetermined minimum exhaustion level prior to accelerating rotation of the coating substrate to a high speed to effect spreading of the coating fluid. The resulting spun-on coatings exhibit reduced defect formation and reduced aerosol particle redeposition thereon.

REFERENCES:
patent: 5670210 (1997-09-01), Mandall
patent: 5716673 (1998-02-01), Yen et al.
patent: 5827782 (1998-10-01), Shih

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