Method of examining aperture diameter of disk substrate...

Geometrical instruments – Gauge – Internal

Reexamination Certificate

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Reexamination Certificate

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07987610

ABSTRACT:
The present invention relates to a method of examining an aperture diameter of a disk substrate having a circular aperture in the central portion thereof, the method including: attempting to pass a standard sphere for the aperture diameter through the aperture; and inspecting the aperture diameter of the disk substrate, based on whether the sphere passes through the aperture or not. Furthermore, the present invention relates to an examination apparatus thereof.

REFERENCES:
patent: 1225314 (1917-05-01), Conrad
patent: 2826819 (1958-03-01), Esken
patent: 3581881 (1971-06-01), Hobbs, II
patent: 5351410 (1994-10-01), Hainneville
patent: 6050127 (2000-04-01), Rao et al.
patent: 6280294 (2001-08-01), Miyamoto
patent: 7013713 (2006-03-01), Webster et al.
patent: 52154986 (1977-12-01), None
patent: 57028201 (1982-02-01), None
patent: 59073716 (1984-04-01), None
patent: 61167809 (1986-07-01), None
patent: 63282601 (1988-11-01), None
patent: 03063501 (1991-03-01), None
patent: 07-198303 (1995-08-01), None
patent: 07328190 (1995-12-01), None
patent: 11-033886 (1999-02-01), None
patent: 11-221742 (1999-08-01), None

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