Method of examining an optical component

Details Method of examining an optical component Method of examining an optical component

1989-10-26

1991-04-02

Willis, Davis L.

Optics: measuring and testing

By polarized light examination

With birefringent element

G01B 902

Patent

active

050043463

ABSTRACT:
The invention is directed to a method for testing optical components and tests can be made on aspherical surfaces or, more specifically, on aspherical wavefronts. For this purpose, the collimator of an interferometer which generates the test wave is displaced relative to the test component and interferograms are electronically registered by means of an image sensor in different positions of the collimator and are stored as light path length differences between the test beam and the comparison beam for the individual image points of each interferogram. The relative position between the collimator and the test component is additionally measured with high precision. Thereafter, the light path length differences which were measured interferometrically are compared with desired light path length differences computed for the different positions of the collimator or determined by calibration. From this comparison, the aspheric form of the wavefront of the test component is computed. For this computation, the measured values obtained for the different component regions of the test component are integrated over the entire surface of the test component with the measured regions being those wherein the test wave falls essentially perpendicularly onto the surface of the test component.

REFERENCES:
patent: 3740750 (1973-06-01), Munnendyn
patent: 4074937 (1978-02-01), Zanoni
patent: 4387994 (1983-06-01), Balasubramanian
patent: 4396289 (1983-08-01), Fantone
patent: 4696572 (1987-09-01), Ono
patent: 4743117 (1988-05-01), Kitabayashi et al.
"Rotating Scan Interferometer" by P. Langenbeck, Proceedings of SPIE, vol. 396 (1983), pp. 99-101.

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