Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2004-09-03
2008-11-18
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S601000, C356S445000, C356S521000, C250S492100
Reexamination Certificate
active
07453560
ABSTRACT:
There is provided an evaluation method of a reflective optical element on which a multilayer film is formed, including the step of calculating a phase difference between light incident upon the multilayer film and light reflected from the multilayer film using a standing wave produced when introducing light with a wavelength of 2 to 40 into the optical element.
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Canon Kabushiki Kaisha
Morgan & Finnegan , LLP
Nguyen Sang
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