Method of etching using hydrofluorocarbon compounds

Details Method of etching using hydrofluorocarbon compounds Method of etching using hydrofluorocarbon compounds

1997-12-31

2000-09-19

Turner, A. A.

Compositions

Etching or brightening compositions

Inorganic acid containing

252 791, 252 793, 510108, 510405, 570123, 570124, C09K 1306, C09K 1300

Patent

active

061206970

ABSTRACT:
A method of etching comprising subjecting a material under plasma etching conditions to an etching composition comprising at least an etchant compound having the formula C.sub.X H.sub.C F.sub.Z

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