Method of etching a glass substrate

Details Method of etching a glass substrate Method of etching a glass substrate

2008-04-22

2008-04-22

Ghyka, Alexander (Department: 2812)

Semiconductor device manufacturing: process

Chemical etching

Liquid phase etching

C438S030000, C216S097000, C257SE21251

Reexamination Certificate

active

07361610

ABSTRACT:
The present invention discloses an etching apparatus comprising an etching bath having an etchant; an etchant recycling part in the etching bath; a DI and undiluted etchant supply part for supplying a DI water and a undiluted etchant; an etchant mixing part for mixing the DI water and the undiluted etchant; and an etchant heating part for heating the mixed etchant.

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