Method of erasing UPROM transistors

Semiconductor device manufacturing: process – Repair or restoration

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36518532, 365218, 257323, 438 15, 438257, 438308, 438972, H01L 21263, H01L 218246

Patent

active

056565216

ABSTRACT:
The failure rate of semiconductor devices containing UPROM transistors is improved by erasing the UPROM transistors using X-rays. The semiconductor devices are subsequently exposed to UV radiation to erase other transistors charged during X-ray exposure.

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patent: 5343434 (1994-08-01), Noguchi
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R.R. Ferber, IEEE Trans. Nucl. Sci., 18 (1971)138 "Preprogrammed . . . memory by use of ionizing radiation". Jun. 1971.
D.R. Myers, IEEE Trans. Nucl. Sci., NS28 (6) (1981)4038, "UV EPROM erasure in flash X-ray . . . ". Dec. 1981.
W.E. Abare et al., IEEE Trans. Nucl. Sci., NS30 (6) (1983) 4285 "Flash X-ray testing of . . . EAROMS". Dec. 1983.

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