Method of erasing repeated patterns and pattern defect...

Image analysis – Applications – Manufacturing or product inspection

Reexamination Certificate

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Details

C382S173000, C382S274000, C382S218000, C356S237400

Reexamination Certificate

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06909798

ABSTRACT:
An image of a subject of inspection is picked up, and this image is demarcated into a plurality of areas. Density differences are found between reference pixels and a plurality of comparison pixels in the demarcated areas, and a density difference that is closest to 0 is determined as a specific density difference. The specific density difference is then applied to the reference density in the image of the subject, whereby repeated patterns in the image are erased.

REFERENCES:
patent: 5185812 (1993-02-01), Yamashita et al.
patent: 5717780 (1998-02-01), Mitsumune et al.
patent: 6005978 (1999-12-01), Garakani
patent: 6222935 (2001-04-01), Okamoto
patent: 6252981 (2001-06-01), Guest et al.
patent: 6347150 (2002-02-01), Hiroi et al.
patent: 6539106 (2003-03-01), Gallarda et al.

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