Method of engraving a conductive layer

Details Method of engraving a conductive layer Method of engraving a conductive layer

1973-02-12

1976-12-14

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

156 11, 156 18, 427 96, 427 99, B05D 512, H01L 21312

Patent

active

039973808

ABSTRACT:
For avoiding the formation of sharp edges and lateral depressions in the conductors engraved from a conductive layer coated over an insulating surface, a thin film of a conductive material other than the conductive material of the layer is first coated over the said layer. After deposition of a mask of resist over said film, two successive engraving operations are made, the first one with a first acid solution inactive with respect to the material of the layer, the second one with a second acid solution inactive with respect to the material of the film.

REFERENCES:
patent: 3556951 (1971-01-01), Cerniglia et al.
patent: 3645785 (1972-02-01), Hentzschel
patent: 3695955 (1972-10-01), Jochems et al.
Chemical Engineer's Handbook; John Perry; McGraw-Hill Book Company, 2nd Ed., pp. 2728-2733.

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