Method of electrically measuring a thin oxide thickness by tunne

Details Method of electrically measuring a thin oxide thickness by tunne Method of electrically measuring a thin oxide thickness by tunne

1994-08-08

1996-01-16

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324767, G01R 2700

Patent

active

054850975

ABSTRACT:
A method of electrically measuring thin oxide thickness by tunnel voltage in a device under test includes the steps of applying a predetermined value of current density through the device under test, measuring voltage developed across the device under test, and calculating the oxide electrical thickness through a predetermined calibration curve. This method is suitable for incorporation into an automatic tester for fast and high volume data collection. This technique also has higher resolution and accuracy than measurements obtained optically.

REFERENCES:
patent: 4323842 (1982-04-01), McGarrity
patent: 4520448 (1985-05-01), Tremintin
patent: 5023561 (1991-06-01), Hillard
patent: 5032786 (1991-07-01), Kimura
patent: 5285151 (1994-02-01), Akama et al.

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