Chemistry: electrical and wave energy – Processes and products
Patent
1974-12-06
1976-01-13
Tufariello, T. M.
Chemistry: electrical and wave energy
Processes and products
29589, 204 15, C25D 502
Patent
active
039322262
ABSTRACT:
An improved method of electrically interconnecting a plurality of spaced semiconductor elements adjacent to a substrate, each element having a mesa shape with a top surface spaced apart from the substrate and a side surface, includes coating the side surfaces of the elements with a protective material, filling in the space above the substrate and in between the elements with a temporary support material, depositing a continuous electrically-conductive layer on the support material and in electrical contact with the top surfaces of a plurality of the elements, and then removing the temporary support material to form an electrically-conductive homogeneous air-bridge. The protective material protects the elements from being exposed to the temporary support material. By this method, a plurality of metallized air-bridges can be formed simultaneously.
REFERENCES:
patent: 3514378 (1970-05-01), MacDougall
patent: 3859180 (1975-01-01), Hasty
Klatskin Jerome Barnard
Rosen Arye
Christoffersen H.
RCA Corporation
Tufariello T. M.
Williams R. P.
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