Method of ejecting liquid from a micro-electromechanical device

Details Method of ejecting liquid from a micro-electromechanical device Method of ejecting liquid from a micro-electromechanical device

2006-02-21

2006-02-21

Gordon, Raquel Yvette (Department: 2853)

Incremental printing of symbolic information

Ink jet

Controller

Reexamination Certificate

active

07001007

ABSTRACT:
A method of fabricating a printhead chip that includes a plurality of nozzle arrangements, each nozzle arrangement having nozzle chamber walls that define a nozzle chamber and an ink ejection port bounded by a rim includes the step of depositing a sacrificial layer on a substrate having drive circuitry formed on the substrate. The sacrificial layer is etched to define deposition zones for the nozzle chamber walls and the rim. A conformal layer of structural material is deposited on the sacrificial layer. The conformal layer is planarized to a predetermined depth to define each ink ejection port bounded by its respective rim. The sacrificial layer is then etched away.

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U.S. Appl. No. 09/835,472, filed Oct. 15, 1999, Silverbrook.
U.S. Appl. No. 09/807,297, filed Oct. 15, 1999, Silverbrook.

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