Metal working – Method of mechanical manufacture – Electrical device making
Patent
1993-07-27
1994-11-15
Arbes, Carl J.
Metal working
Method of mechanical manufacture
Electrical device making
29846, 156901, 156902, 174262, H01K 310
Patent
active
053635531
ABSTRACT:
Disclosed is a method of producing vias and through holes through a metal laminate. The laminate is a multi-layer, for example, a trilayer of a relatively hard metal between two layers of a relatively soft metal. The method includes the steps of first etching a clearance hole through the soft metal on one side of the trilayer laminate, followed by partially etching the hard metal layer. Next, drilling the remaining thickness of the hard metal, and drilling through the second layer of soft metal.
REFERENCES:
patent: 4830704 (1989-05-01), Voss et al.
Edwards Robert D.
Egitto Frank D.
Gall Thomas P.
Gursky Paul S.
Houser David E.
Arbes Carl J.
Goldman Richard M.
International Business Machines Inc.
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