Method of doping a semiconductor

Chemistry: electrical and wave energy – Processes and products – Electrostatic field or electrical discharge

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C25D 500

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active

043929281

ABSTRACT:
A method for doping semiconductor material. An interface is established between a solid electrolyte and a semiconductor to be doped. The electrolyte is chosen to be an ionic conductor of the selected impurity and the semiconductor material and electrolyte are jointly chosen so that any compound formed from the impurity and the semiconductor will have a free energy no lower than the electrolyte. A potential is then established across the interface so as to allow the impurity ions to diffuse into the semiconductor. In one embodiment the semiconductor and electrolyte may be heated so as to increase the diffusion coefficient.

REFERENCES:
patent: 4032418 (1977-06-01), Antula

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