Method of dividing and exposing patterns

Details Method of dividing and exposing patterns Method of dividing and exposing patterns

1997-03-26

1999-01-12

Rutledge, D.

Photocopying

Projection printing and copying cameras

Step and repeat

257211, G03D 2742

Patent

active

058596909

ABSTRACT:
A method of dividing a circuit pattern to be transferred by a photoprinting apparatus from a reticle to a photosensitive surface. The circuit pattern has a display section and a conductor section. The method includes dividing the circuit pattern into a plurality of divided patterns wherein each of the divided patterns includes at least a part of the display section and a part of the conductor section; and forming a plurality of reticles, each of the reticles having at least one of the divided patterns thereon.

REFERENCES:
patent: 4708466 (1987-11-01), Isohata et al.
patent: 4814830 (1989-03-01), Isohata et al.
patent: 4878086 (1989-10-01), Isohata et al.
patent: 5539224 (1996-07-01), Ema

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