Method of displaying measurement result in inspection...

Details Method of displaying measurement result in inspection... Method of displaying measurement result in inspection...

2006-01-24

2006-01-24

Nghiem, Michael (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S035000, C702S084000, C702S097000

Reexamination Certificate

active

06990421

ABSTRACT:
A method of displaying a measurement result in an inspection process using network, the method includes a first step that a host, which intensively controls and manages a device for inspecting a lot to be processed in one or a plurality of steps, transmits to the device a condition of measuring a lot determined to be put in, a second step that the device measures the lot based on the measurement condition received via the network and then obtains measured data, a third step that the host determines whether the measured data received via the network is abnormal or normal based on a predetermined assessment standard and then produces a result of assessing a measured value so as to transmit the result to the device and a fourth step that the device provides a display corresponding to the result of assessing the measured value in accordance with the received result of assessing the measured value as well as a previously registered display standard.

REFERENCES:
patent: 6456951 (2002-09-01), Maeda et al.
patent: 05-074899 (1993-03-01), None
patent: 05-074900 (1993-03-01), None

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