Method of direct bonding of crystals and crystal devices

Details Method of direct bonding of crystals and crystal devices Method of direct bonding of crystals and crystal devices

1992-10-01

1994-06-07

Mis, David

Oscillators

Electromechanical resonator

Crystal

331162, 331163, 331176, 29 2535, 310315, 310318, 310320, 310366, 333187, 333189, H01L 4104, H01L 41107, H03B 532, H03H 954

Patent

active

053193245

ABSTRACT:
A method of directly bonding a crystal to a crystal includes the steps of mirror-polishing the surfaces of the crystals and then rinsing them with a cleaning material and then affecting a baking operation and then bonding them together and thereafter annealing them within a temperature range where crystal crystallization is not transited in phase so that a further strong bonding force is obtained. A crystal resonator is obtained where electrodes are oppositely established across a ply crystal blank with at least two sheets of crystal blanks having a desired cut angle and a desired thickness being directly bonded so that the respective crystal axes intersect at the desired angles. The ply crystal blank may have a central portion which is either thicker or thinner than a surrounding portion. A crystal oscillator including a crystal resonator having the above noted features may be fabricated and a temperature compensated crystal oscillator of either the analog or digital type may also be formed using such a crystal resonator. A crystal filter may also be formed using a ply crystal bank with at least two sheets of crystal blanks having a desired cut angle and a desired shape being directly bonded so that respective crystal axes intersect at the desired angles.

REFERENCES:
patent: 4503350 (1985-03-01), Nakatani
"Proceedings of the 39th Annual Symposium on Frequency Control 1985", May 29-31, 1985, R. D. Smythe et al., IEEE, pp. 481-485.

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