Method of determining surface relief without making contact ther

Details Method of determining surface relief without making contact ther Method of determining surface relief without making contact ther

1987-01-28

1988-08-09

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356376, G01B 1130

Patent

active

047624191

ABSTRACT:
A method of rapidly determining surface relief of an object or a structure without making contact therewith based on quantifying the degree to which the image of an illuminated point or small spot on the surface is defocussed. Said point or spot is illuminated by a source of electromagnetic radiation such as a laser, and the relief is determined in the form of a profile where the height of any point on the profile is represented by the ratio of the energy values of two beams derived by splitting a single beam reflected from the surface under investigation: one of the beams acting as a reference and the other of the beams being limited by the action of a diaphragm and constituting a measurement beam.

REFERENCES:
patent: 3663107 (1972-05-01), Denis et al.
patent: 4017188 (1977-04-01), Sawartari
patent: 4088408 (1978-05-01), Burcher et al.
patent: 4548504 (1985-10-01), Morander
Sawatari et al., Optical Engineering, vol. 18, No. 2, Mar.-Apr. 1979, pp. 222-225.
Journal of Optics (Paris) vol. 14, No. 1, Jan.-Feb. 1983, pp. 19-23.

Affiliated with

Also associated with

Rating

Method of determining surface relief without making contact ther does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of determining surface relief without making contact ther, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of determining surface relief without making contact ther will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-915575