Method of determining regularity of a pattern array to enable po

Details Method of determining regularity of a pattern array to enable po Method of determining regularity of a pattern array to enable po

1990-08-30

1992-10-06

Turner, Samuel A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, 250557, 356400, G01B 1100

Patent

active

051536781

ABSTRACT:
A method of determining regularity of a pattern array on a substrate to enable sequential positioning of patterns of the array relative to a reference position includes the step of calculating a reliability degree regarding a measured value of a pattern position, and the step of determining the regularity of the pattern array on the basis of the calculated reliability degree, and a design value and the measured value of the pattern position.

REFERENCES:
patent: 4677301 (1987-06-01), Tanimoto et al.
patent: 4710026 (1987-12-01), Magome et al.
patent: 4780617 (1988-10-01), Umatate et al.
patent: 4918320 (1990-04-01), Hamasaki et al.

Affiliated with

Also associated with

Rating

Method of determining regularity of a pattern array to enable po does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of determining regularity of a pattern array to enable po, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of determining regularity of a pattern array to enable po will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1193533