Method of determining properties of patterned thin film...

Details Method of determining properties of patterned thin film... Method of determining properties of patterned thin film...

2008-04-29

2008-04-29

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

Dimension

C356S432000, C374S045000, C073S800000

Reexamination Certificate

active

07365864

ABSTRACT:
The present invention measures a structure including multiple narrow metallic regions, each being disposed between neighboring regions comprising a second, non-metallic material. One step of the method is exciting the structure by irradiating it with a spatially periodic excitation field made up of excitation stripes in order to generate a thermal grating. Other steps are diffracting a probe laser beam off the thermal grating to form a signal beam; detecting the signal beam as a function of time to generate a signal waveform; and determining at least one property of the structure based on a thermal component of the signal waveform.

REFERENCES:
patent: 6256100 (2001-07-01), Banet et al.
patent: 6587794 (2003-07-01), Maznev
patent: 2002/0030826 (2002-03-01), Chalmers et al.
patent: 1 150 173 (2001-10-01), None

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