Data processing: measuring – calibrating – or testing – Calibration or correction system – Position measurement
Reexamination Certificate
2005-12-20
2005-12-20
Barlow, John (Department: 2863)
Data processing: measuring, calibrating, or testing
Calibration or correction system
Position measurement
C250S307000, C250S311000, C702S085000
Reexamination Certificate
active
06978215
ABSTRACT:
This invention allows the scan nonlinearity of different type of scanning microscopes to be measured, including: optical, confocal, scanning electron and scanning probe microscopes. The scan nonlinearity of the scanning type measuring microscopes can be considerable source of errors in precise measurements of the Critical Dimension—CDs. The invention allows scanning measuring microscopes to be certified for scan nonlinearity; this invention can be used for the monitoring, adjustment and/or alignment of these type instruments. The high reliability of scan nonlinearity determination is achieved with the use of a pair of offset images of a calibration structure and consequent computer analysis of the signal differences. In addition to scan nonlinearity of a scanning measuring microscope being determined this proposed invention allows determination of heterogeneity of the pitch values intrinsic to any test-objects with periodic structure used as calibration references.
REFERENCES:
patent: 5825670 (1998-10-01), Chernoff et al.
Barlow John
General Phosphorix LLC
Le John
Zborovsky I.
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