Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2005-04-26
2005-04-26
Bahta, Kidest (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S056000, C700S279000, C701S120000
Reexamination Certificate
active
06885908
ABSTRACT:
A determining method of movement sequence and a positioning apparatus of the invention are arranged in such a manner that, in order to measure positions of plural marks as being measurement targets provided on a wafer within a shorter time, a group including executable movement sequences is generated out of a group of movement sequence candidates, each indicating a measurement order of these marks, and a movement sequence that accomplishes a movement operation between the marks within the shortest time is obtained from the group thus generated.For efficiently searching an optical system as a globally optimal solution within a shorter computation time, independently of an initial solution given, a designing method of optical system of the invention obtains the optimal solution of the optical system to be designed, using an evolutionary computation method (genetic algorithm) having a genetic operator for handling continues values explicitly. Particularly, from a partial space defined by a predetermined continuous occurrence probability distribution of occurrence probabilities set based on parent individuals, child individuals to be candidates in the next generation population are generated according to the occurrence probabilities.
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Kiyohara Junya
Kobayashi Shigenobu
Ono Isao
Tatsuzawa Yoshihiro
Yoshida Koji
Bahta Kidest
Nikon Corporation
Staas & Halsey , LLP
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