Method of determining local structures in optical crystals

Details Method of determining local structures in optical crystals Method of determining local structures in optical crystals

2006-01-24

2006-01-24

Lee, Hwa (Andrew) (Department: 2877)

Optics: measuring and testing

By light interference

Having polarization

C356S073000, C356S369000

Reexamination Certificate

active

06989904

ABSTRACT:
The method for determining local structures in optical materials, especially crystals, includes observing schlieren visually in a material to be tested with divergent white light in a first step; measuring birefringence of polarized laser light in the material to determine local defects and structure faults in the material with a spatial resolution of 0.5 mm or better in a second step if the material is judged to be suitable in the first step and then interferometrically measuring the material to determine the faults in the material by interferometry in a third step if the material is judged to be suitable in the first and second steps. This method can be part of a method for making optical components, especially for microlithography.

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