Method of detecting positional deviation

Details Method of detecting positional deviation Method of detecting positional deviation

1990-07-17

1992-05-19

Turner, Samuel A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250237G, G01B 1127

Patent

active

051142350

ABSTRACT:
A method of detecting relative positional deviation of first and second substrates, wherein first and second marks with optical powers are formed on the first and second substrates. A radiation beam is projected to the first substrate and, as a result, the first and second marks produce a signal beam whose position of incidence upon a predetermined plane is changeable with the relative positional deviation of the first and second substrates. A sensor is disposed adjacent to the predetermined plane and receives the signal beam to produce an output signal corresponding to the position of incidence of the signal beam upon the sensor. Here, a reference mark is provided to produce, when irradiated with a radiation beam, a reference beam so that it advances along a light path substantially the same as the light path for the signal beam to the sensor when the first and second substrates are in a predetermined positional relation. The produced reference beam is received by the sensor, whereby a reference signal corresponding to the position of incidence of the reference beam upon the sensor is obtained. The relative position of the first and second substrates can be detected on the basis of the output signal and the reference signal.

REFERENCES:
patent: 4037969 (1977-07-01), Feldman et al.
patent: 4327805 (1982-04-01), Feldman et al.
patent: 4600309 (1986-07-01), Fay
patent: 4614433 (1986-09-01), Feldman et al.
patent: 4838693 (1989-06-01), Uchida et al.
patent: 4948983 (1990-08-01), Maruyama et al.

Affiliated with

Also associated with

Rating

Method of detecting positional deviation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of detecting positional deviation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of detecting positional deviation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2414358