Method of detecting position of mark on substrate, position dete

Details Method of detecting position of mark on substrate, position dete Method of detecting position of mark on substrate, position dete

1996-09-24

2000-03-07

Le, Que T.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

250237G, 356401, 356349, G01N 2186

Patent

active

060343788

ABSTRACT:
In a method of detecting a position of a position detection grating mark formed with a small step structure on a surface of a flat object, an illumination light beam is irradiated on the grating mark at a predetermined incident angle. The illumination light beam includes a plurality of coherent beams having n (n.gtoreq.3) different wavelengths .lambda..sub.1, .lambda..sub.2, .lambda..sub.3, . . . , .lambda..sub.n. The n wavelengths are set to approximately satisfy the following relation within a range of about .+-.10%:

REFERENCES:
patent: 4828392 (1989-05-01), Nomura et al.
patent: 5118953 (1992-06-01), Ota et al.
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5160849 (1992-11-01), Ota et al.
patent: 5488230 (1996-01-01), Mizutani et al.
patent: 5543921 (1996-08-01), Uzawa et al.
patent: 5559601 (1996-09-01), Gallatin et al.

Affiliated with

Also associated with

Rating

Method of detecting position of mark on substrate, position dete does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of detecting position of mark on substrate, position dete, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of detecting position of mark on substrate, position dete will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-365466