Method of detecting position of mark on substrate, position...

Details Method of detecting position of mark on substrate, position... Method of detecting position of mark on substrate, position...

2006-09-19

2006-09-19

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S548000

Reexamination Certificate

active

07109508

ABSTRACT:
An exposure apparatus and method in which a mark on an object is illuminated, and plural pairs of two diffractive beams of same order are generated and directed to different reference gratings to detect positional information of the mark. Beams received from the different reference gratings have different order.

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