Method of detecting coma of projection optical system

Details Method of detecting coma of projection optical system Method of detecting coma of projection optical system

1995-07-05

1998-06-02

Moses, R. L.

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 53, 355 77, 356399, 356400, 356401, G03B 2742, G03B 2752, G03B 2732

Patent

active

057608792

ABSTRACT:
A method of detecting coma of a projection optical system includes receiving an image of a pattern projected by the projection optical system, at at least one position along an optical axis of the projection optical system, detecting a position of at least one received pattern image, with respect to a plane perpendicular to the optical axis of the projection optical system, and determining coma of the projection optical system on the basis of the detection.

REFERENCES:
patent: 4888614 (1989-12-01), Suzuki et al.
patent: 5117254 (1992-05-01), Kawashima et al.
patent: 5251070 (1993-10-01), Hashimoto et al.
patent: 5289312 (1994-02-01), Hashimoto et al.
patent: 5424552 (1995-06-01), Tsuji et al.
patent: 5436692 (1995-07-01), Noguchi
patent: 5615006 (1997-03-01), Hirukawa et al.
Kingslake, Rudolf, Optical System Design, Academic Press, NY, 1983.

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