Method of detecting and classifying scratches, particles and...

Details Method of detecting and classifying scratches, particles and... Method of detecting and classifying scratches, particles and...

2005-06-21

2005-06-21

Nguyen, Tu T. (Department: 2877)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

06909500

ABSTRACT:
Scratches, pits and particles which are smaller or larger than the beam size may be measured and identified by a dual beam technique. This invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction. The scattered light from radial and circumferential beams allows the detection and classification of particles, pits and scratches.

REFERENCES:
patent: 3885875 (1975-05-01), Rosenfeld et al.
patent: 4332477 (1982-06-01), Sato
patent: 4585348 (1986-04-01), Chastang et al.
patent: 4668860 (1987-05-01), Anthon
patent: 4870631 (1989-09-01), Stoddard
patent: 4873430 (1989-10-01), Juliana et al.
patent: 5017012 (1991-05-01), Merritt, Jr. et al.
patent: 5129724 (1992-07-01), Brophy et al.
patent: 5189481 (1993-02-01), Jann et al.
patent: 5196906 (1993-03-01), Stover et al.
patent: 5270794 (1993-12-01), Tsuji et al.
patent: 5293216 (1994-03-01), Moslehi
patent: 5313542 (1994-05-01), Castonguay
patent: 5406082 (1995-04-01), Pearson et al.
patent: 5416594 (1995-05-01), Gross et al.
patent: 5446549 (1995-08-01), Mazumder et al.
patent: 5463897 (1995-11-01), Prater et al.
patent: 5586101 (1996-12-01), Gage et al.
patent: 5608527 (1997-03-01), Valliant et al.
patent: 5610897 (1997-03-01), Yamamoto et al.
patent: 5633747 (1997-05-01), Nikoonahad
patent: 5644562 (1997-07-01), de Groot
patent: 5694214 (1997-12-01), Watanabe et al.
patent: 5715058 (1998-02-01), Bohnert et al.
patent: 5726455 (1998-03-01), Vurens
patent: 5748305 (1998-05-01), Shimono et al.
patent: 5777740 (1998-07-01), Lacey et al.
patent: 5798829 (1998-08-01), Vaez-Iravani
patent: 5864394 (1999-01-01), Jordan, III et al.
patent: 5875029 (1999-02-01), Jann et al.
patent: 5880838 (1999-03-01), Marx et al.
patent: 5903342 (1999-05-01), Yatsugake et al.
patent: 5951891 (1999-09-01), Barenboim et al.
patent: 5978091 (1999-11-01), Jann et al.
patent: 5985680 (1999-11-01), Singhal et al.
patent: 5986761 (1999-11-01), Crawforth et al.
patent: 5986763 (1999-11-01), Inoue
patent: 5995226 (1999-11-01), Abe et al.
patent: 6034378 (2000-03-01), Shiraishi
patent: 6081325 (2000-06-01), Leslie et al.
patent: 6088092 (2000-07-01), Owen et al.
patent: 6091493 (2000-07-01), Stover et al.
patent: 6107637 (2000-08-01), Watanabe et al.
patent: 6118525 (2000-09-01), Fossey et al.
patent: 6134011 (2000-10-01), Klein et al.
patent: 6157444 (2000-12-01), Tomita et al.
patent: 6169601 (2001-01-01), Eremin et al.
patent: 6172752 (2001-01-01), Haruna et al.
patent: 6201601 (2001-03-01), Vaez-Iravani et al.
patent: 6248988 (2001-06-01), Krantz
patent: 6271916 (2001-08-01), Marxer et al.
patent: 6307627 (2001-10-01), Vurens
patent: 6353222 (2002-03-01), Dotan
patent: 6384910 (2002-05-01), Vaez-Iravani et al.
patent: 6509966 (2003-01-01), Ishiguro et al.
patent: 6542248 (2003-04-01), Schwarz
patent: 6603542 (2003-08-01), Chase et al.
patent: 6639662 (2003-10-01), Vaez-Iravani et al.
patent: 3-221804 (1991-09-01), None
patent: WO 98/52019 (1998-11-01), None
W.C. Leung, W. Crooks, H. Rosen and T. Strand,An Optical Method Using a Laser and an Integrating Sphere Combination for Characterizing the Thickness Profile of Magnetic Media, Sep. 1989, IEEE Transaction on Magnetics, vol. 25, No. 5. pp. 3659-3661.
Steven W. Meeks, Walter E. Weresin, and Hal J. Rosen,Optical Surface Analysis of the Head-Disk-Interface of Thin Film Disks, Jan. 1995, Transactions of the ASME, Journal of Tribology, vol. 117, pp. 112-118.
Steven Meeks, Maxtor and Rusmin Kudinar,The Next Battleground: Head-Disk Interface, Mar. 1998, Data Storage, Test & Measurement, pp. 29-30, 34 and 38.
Laser Scanning Surface Profilometer, [online], Aug. 1970, [retrieved Jan. 29, 2001], pp. 789-790, Retrieved from the Internet: <URL: http://www.delphion.com/tdbs/tdb?&order=7OC101758.
Meeks, Steven W.: “A Combined Ellipsometer, Reflectometer, Scatterometer and Kerr Effect Microscope for Thin Film Disk Characterization,” Machine Vision Applications in Industrial Inspection VIII, Proceedings of SPIE, vol. 3966, 2000, pp. 385-391, XP001085220.

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