Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-10-17
2006-10-17
Stafira, Michael P. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237200
Reexamination Certificate
active
07123357
ABSTRACT:
Scratches, pits and particles which are smaller or larger than the beam size may be measured and identified by single and multiple beam techniques. In one embodiment, the invention uses a pair of orthogonally oriented laser beams, one in the radial and one in the circumferential direction. In another embodiment, two pairs of orthogonally oriented laser beams are used. The scattered light from radial and circumferential beams allows the detection and classification of particles, pits and scratches. In other embodiments, single beam techniques are used to classify radial and circumferential defects.
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Candela Instruments
Fenwick & West LLP
Stafira Michael P.
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