Method of detecting and analyzing impurities

Details Method of detecting and analyzing impurities Method of detecting and analyzing impurities

1988-02-09

1992-11-10

Warden, Robert J.

Chemistry: analytical and immunological testing

Pyrolysis, combustion, or elevated temperature conversion

436175, 7386311, 356 36, 134 21, 134 26, G01N 100, B08B 504

Patent

active

051622335

ABSTRACT:
A method of detecting and analyzing impurities wherein a substrate is cleaned by heating it under vacuum, a liquid sample is dropped on a surface of the substrate under vacuum which vacuum is less than that of the previous step, the liquid sample which has thus been dropped on the substrate is dried by reducing the pressure of the atmosphere surrounding the substrate, and impurities contained in the liquid sample are detected and analyzed by examining the surface of the substrate. Thus, this method is adapted to minimize the risk of any foreign matter becoming mixed with the sample liquid, to thus ensure a high level of precision in the detection and analysis of impurities.

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Chemical Principles, Dickerson, R. E., Gray H. B., Haight, G. P., 3rd Ed, The Benjamin/Cummings Pub. Co., Inc., Calif., 1979.
"The PHI 5000 Series ESCA Systems", Perkin-Elmer Co., Ltd., PHI Data Sheet 1066 Sep. 1983 10M.

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