Method of depositing thin films using microwave energy

Details Method of depositing thin films using microwave energy Method of depositing thin films using microwave energy

1986-08-13

1987-10-20

Newsome, John H.

Coating processes

Electrical product produced

Integrated circuit, printed circuit, or circuit board

437225, C23C 1102

Patent

active

047013435

ABSTRACT:
An improved method of depositing thin films onto a substrate with microwave energy by operating at substantially the minimum of the pressure-power curve for the particular geometry of reaction vessel and composition of reaction gases being utilized.

REFERENCES:
patent: 4226878 (1980-10-01), Ovshinsky et al.
patent: 4363828 (1982-12-01), Brodsky et al.
Brodsky et al, "IBM TDB", vol. 22, No. 8A, Jan. 1980, pp. 3391, 3392.
Cohen, "Electronics", vol. 54, No. 22, Nov. 1981, pp. 82, 84.

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