Coating processes – Nonuniform coating
Patent
1996-07-23
1999-02-02
King, Roy V.
Coating processes
Nonuniform coating
4272481, 4272555, B05D 500
Patent
active
058662049
ABSTRACT:
A method of making vapor deposited thin films by rotating a substrate in the presence of an obliquely incident vapor flux. The substrate may be rotated about an axis normal to the surface of the substrate and/or parallel to the surface of the substrate by two motors mounted with their axes orthogonal to each other. Angle of incidence, measured from the normal to the surface of the substrate, exceeds 80.degree.. Feedback from a deposition rate monitor allows control of rotation speed of both motors to produce a growth with a defined pattern.
REFERENCES:
patent: 4816946 (1989-03-01), Kira et al.
patent: 4874664 (1989-10-01), Hamaguchi et al.
patent: 4947046 (1990-08-01), Kawabata et al.
patent: 5226383 (1993-07-01), Bhat
Tailoring growth and local composition by oblique-incidence deposition: a review and new experimental data, Herma van Kranenburg and Cock Lodder, Materials Science and Engineering R11, No. 7, Jan. 15, 1994, pp. 295-354.
Chiral thin solid films: Method of deposition and applications, R.M.A. Azzam, Appl. Phys. Lett. 61(26), 28 Dec. 1992, pp. 3118-3120.
Sculptured Thin Films (STFs) for Optical, Chemical and Biological Applications, A. Lakhtakia, R. Messier, M.J. Brett and K. Robbie, Innovations in Materials Research, vol. 1, No. 2, pp. 167-176, Jul., 1996.
Chiral sculptured thin films, K. Robbie, J.M. Brett, Nature, vol. 384 . 19/26 Dec., 1996, 1 page.
Project Summary for Grant Proposal 960048 of Reveo, Inc., found on the internet on Jan. 4, 1997, actual publication date not known, one page.
Project Summary for Grant Proposal 960049 of Reveo, Inc., found on the internet on Jan. 4, 1997, actual publication date not known, one page.
Technical Abstract of Reveo Inc. relating to topic No. BMDO96-011, title: "High performance circular polarizers for space applications" found on the internet on Jan. 4, 1997, actual publication date not known, one page.
Technical abstract of Reveo, Inc., relating to topic No. BMDO96-011, title: "Novel Chiral Film Technology for Ultrahigh-Capacity and Ultrafast-Retrieval Optical Storage", found on the internet on Jan. 4, 1997, actual publication date not known, one page.
Technical abstract of Reveo, Inc., title: "Novel Superbroadband Reflective Polarizer", available on the internet in Jan. 1997, from the site http://www.spie.org/web/abstracts/2800/2873.html, together with material on awards from site http://www.sbaonline.sba.gov, also available on the internet in Jan. 1997, publication dates not known.
Optically Active Fluorite Films, Niels O. Young, Jakym Kowal, Nature, Jan. 10, 1959, vol. 183, No. 4654, pp. 104 and 105.
Sculptured thin films and glancing angle deposition: Growth mechanics and applications, K. Robbie and M.J. Brett, J. Vac. Sci. Technol. A 15(3), May/Jun. 1997, pp. 1460-1466.
Sculptured Thin Films (STFs) for Optical, Chemical and Biological Applications, A. Lakhtakia, R. Messier, M.J. Brett and K. Robbie, Innovations in Materials Research, vol. 1, No. 2, pp. 165-176, Jul., 1996.
Inhomogeneous thin films optical filters fabricated using glancing angle deposition, K. Robbie, A.J.P. Hnatiw, M.J. Brett, R.I. MacDonald and J.N. McMullin, Electronics Letters, 3rd Jul. 1997, vol. 33 No. 14, pp. 1213-1214.
Abstract of U.S. Patent 5,179,469, Jan. 12, 1993, 2 pages.
Modelling and characterization of columnar growth in evaporated films, R.N. Tait, T. Smy and M.J. Brett, Thin Solid Films, 226 (1993) pp. 196-201.
Abstract of Japanese Patent No. 03134819, Jul. 6, 1991, translated, 1 page.
Robbie et al, Fabrication of Thin Films with highly porous microstructure, J. Vac. Sci.Technol. A 13(3), May/Jun. 1995, pp. 1032-1035.
Tang et al, Patterns and Scaling Properties in a Ballistic Deposition Model, Physical Review Letters, vo. 71, No. 17, 25 Oct. 1993, pp. 2769-2772.
Messier et al, J. Vac. Sci. Technol, A, 15(4) 1997 pp. 2148-2152.
First thin film realization of a helicoidal bianisotropic medium, Kevin Robbie and Michael J. Brett, Akhlesh Lakhtakia, J. Vac. Sci. Technol. A 18 (6), Nov/Dec 1995, pp. 2991-2993. The subject matter of this paper was also disclosed at a meeting at Pennsylvania State university, U.S.A., in Aug. 1995.
Fabrication of thin films with highly porous microstructures, K. Robbie, L.J. Friedrich, and S.K. Dew, T. Smy, M.J. Brett, J. Vac. Sci. Technol. A 13(3), T. Smy, M.J. Brett, J. Vac. Technol. A 13(3), May/Jun. 1995, pp. 1032-1035. The subject matter of this paper was also disclosed at a conference in Denver, U.S.A. in Oct., 1994.
Applications of Interemetallic Compounds, MRS Bulletin, May 1996, vol. 21, No. 5, pp. 7 and 8.
Thin-Film Deposition, Principles and Practice, Donald L. Smith, 1995, pp. 94-98.
Abstract of U.S. Ptent 5,474,611, Dec. 12, 1995, 2 pages.
Abstract of U.S. Patent 5,226,383, Jul. 13, 1993, 2 pages.
Abstract of U.S. Patent 4,794,220, Dec. 27, 1998, 2 pages.
Brett Michael Julian
Robbie Kevin John
Alberta Microelectronic Corporation
King Roy V.
Lambert Anthony R.
The Governors of the University of Alberta
LandOfFree
Method of depositing shadow sculpted thin films does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method of depositing shadow sculpted thin films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of depositing shadow sculpted thin films will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1115063