Method of depositing nanometer scale particles

Coating processes – Direct application of electrical – magnetic – wave – or... – Electrostatic charge – field – or force utilized

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427472, 427125, 427180, 427282, 427337, 438763, B05D 132, B05D 310, B05D 512

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059979585

ABSTRACT:
Nanometre scale particles (3) e.g. of Au are deposited on a Si substrate (2) with a SiO.sub.2 surface layer (1) provided with receptor sites (4) of a first electrical polarity by treatment with APTMS solution. The Au particles (3) have a surface charge (5) of a second opposite polarity e.g from surface adsorbed citrate ions, such that they are attracted to the surface sites on the substrate. The deposited Au particles are then released from the surface sites such that the particles move over the substrate and coalesce into a low dimensional aggregated structure. The aggregated structure may form at a surface irregularity on the surface of the substrate. The structure may be used in a quantum electronic device such as a single electron transistor.

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