Method of depositing multi-layer carbon-based coatings for field

Details Method of depositing multi-layer carbon-based coatings for field Method of depositing multi-layer carbon-based coatings for field

1998-01-20

1999-08-10

King, Roy V.

Coating processes

Electrical product produced

Electron emissive or suppressive

427249, 427122, 427314, 4272557, 427595, 427596, B05D 512, B05D 306

Patent

active

059356391

ABSTRACT:
A novel field emitter device for cold cathode field emission applications, comprising a multi-layer resistive carbon film.
The multi-layered film of the present invention is comprised of at least two layers of a resistive carbon material, preferably amorphous-tetrahedrally coordinated carbon, such that the resistivities of adjacent layers differ. For electron emission from the surface, the preferred structure comprises a top layer having a lower resistivity than the bottom layer. For edge emitting structures, the preferred structure of the film comprises a plurality of carbon layers, wherein adjacent layers have different resistivities. Through selection of deposition conditions, including the energy of the depositing carbon species, the presence or absence of certain elements such as H, N, inert gases or boron, carbon layers having desired resistivities can be produced.
Field emitters made according the present invention display improved electron emission characteristics in comparison to conventional field emitter materials.

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