Method of depositing micro-crystalline solid particles by hot fi

Details Method of depositing micro-crystalline solid particles by hot fi Method of depositing micro-crystalline solid particles by hot fi

1990-10-25

1992-05-12

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Carbon or carbide coating

427 49, 427 50, 427122, 4272481, 427314, 4272551, C23C 1600, B05D 314

Patent

active

051126494

ABSTRACT:
Method of depositing micro-crystalline solid particles from a vapor phase containing a carbonaceous gas using chemical vapor deposition (CVD), in which the solid particles to be deposited are deposited at a pressure in the range from 10.sup.-5 to 1 bar onto a substrate which has been heated to a temperature in the range from 450.degree. to 1200.degree. C. and in which the chemical vapor phase reactions are effected in the gas phase which is thermally energized by means of a resistance heat conductor, a resistance heat conductor made of a carbide of at least one transition metal from the secondary group IVa to VIa of the periodic element system (PSE) with a carbon content which substantially corresponds to a stoichiometrical composition of the carbide and having a melting point of >2000.degree. C. being used.

REFERENCES:
patent: 4958592 (1990-09-01), Anthony et al.
patent: 4988421 (1991-01-01), Drawl et al.

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