Method of depositing metal sulfide films from metal thiocarboxyl

Details Method of depositing metal sulfide films from metal thiocarboxyl Method of depositing metal sulfide films from metal thiocarboxyl

1996-02-27

1998-04-28

Beck, Shrive P.

Coating processes

With post-treatment of coating or coating material

Heating or drying

4271633, 427226, B05C 302, B05C 506

Patent

active

057441987

ABSTRACT:
In a method of depositing a metal sulfide film on a substrate, at least one metal compound precursor comprising at least one thiocarboxylate ligand SECR and at least one solubility-improving ligand L is dissolved in a solvent to produce a solution, wherein a) E is selected from the group consisting of O and S and R is selected from the group consisting of alkyl, aryl, substituted alkyl, substituted aryl, halogenated alkyl, and halogenated aryl; and wherein b) L is selected from the group of monodentate ligands, multidentate ligands, and R.sup.1 O ligands. The solution is coated onto a substrate and the substrate is heated to a reaction temperature sufficient to decompose the metal compound precursor to form a metal sulfide film of at least one metal on the substrate.

REFERENCES:
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patent: 5110622 (1992-05-01), Hasegawa et al.
patent: 5112410 (1992-05-01), Chen
patent: 5273774 (1993-12-01), Karam et al.
patent: 5304281 (1994-04-01), Wang

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