Method of depositing metal oxides

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

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4273762, C23C 1640, B05D 302

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active

054879183

ABSTRACT:
Metal oxide fine powders and thin films prepared by exchange reactions between organosemiconductor oxides (such as disiloxanes) and metal coordination compounds, metallic halides, or organometallic compounds in inert environments and anhydrous solvents.

REFERENCES:
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patent: 3509073 (1970-04-01), Bowman
patent: 3801314 (1974-04-01), Goffe
patent: 4395443 (1983-07-01), Shimuza et al.
patent: 4788079 (1988-11-01), Lindner
patent: 4927704 (1990-05-01), Reed et al.
patent: 5028566 (1991-07-01), Lagendijk
patent: 5069930 (1991-12-01), Hussla et al.
patent: 5089248 (1992-02-01), Akhtar
Hackh's Chemical Dictionary, McGraw Hill, 1969 p. 481.

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