Method of depositing metal oxides

Details Method of depositing metal oxides Method of depositing metal oxides

1992-02-18

1996-01-30

Beck, Shrive

Coating processes

Coating by vapor, gas, or smoke

Mixture of vapors or gases utilized

4273762, C23C 1640, B05D 302

Patent

active

054879183

ABSTRACT:
Metal oxide fine powders and thin films prepared by exchange reactions between organosemiconductor oxides (such as disiloxanes) and metal coordination compounds, metallic halides, or organometallic compounds in inert environments and anhydrous solvents.

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patent: 3509073 (1970-04-01), Bowman
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patent: 4788079 (1988-11-01), Lindner
patent: 4927704 (1990-05-01), Reed et al.
patent: 5028566 (1991-07-01), Lagendijk
patent: 5069930 (1991-12-01), Hussla et al.
patent: 5089248 (1992-02-01), Akhtar
Hackh's Chemical Dictionary, McGraw Hill, 1969 p. 481.

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